Thin Film Applications by Indsustry
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Semiconductor
Applications |
PECVD
FILMS |
LPCVD
FILMS |
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Nitride |
Oxide |
Oxynitride |
Nitride |
LowStress Nitride |
Poly
Silicon |
Amorph
Silicon |
Thermal Oxide |
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| Inter-layer Dielectric |  |
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| Passivation | |
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| Masking Layer | |
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| Barrier Layer | |
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| Field | |
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Micro-Machining Applications |
PECVD
FILMS |
LPCVD
FILMS |
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Nitride |
Oxide |
Oxynitride |
Nitride |
LowStress Nitride |
Poly
Silicon |
Amorph
Silicon |
Thermal Oxide |
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| Mechanical Structures | |
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| Membranes | |
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| Thick Structures | |
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| Encapsulation | |
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| Adhesion Layer | |
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| Patterning | |
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| Wafer Coating | |
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| Insulation | |
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| Cantilever / Beams | |
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Solar and Optical Applications |
PECVD
FILMS |
LPCVD
FILMS |
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Nitride |
Oxide |
Oxynitride |
Nitride |
LowStress Nitride |
Poly
Silicon |
Amorph
Silicon |
Thermal Oxide |
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| Anti Reflection | |
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| Passivation | |
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